JPH01167050U - - Google Patents

Info

Publication number
JPH01167050U
JPH01167050U JP6363688U JP6363688U JPH01167050U JP H01167050 U JPH01167050 U JP H01167050U JP 6363688 U JP6363688 U JP 6363688U JP 6363688 U JP6363688 U JP 6363688U JP H01167050 U JPH01167050 U JP H01167050U
Authority
JP
Japan
Prior art keywords
base
top plate
wafer
support
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6363688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6363688U priority Critical patent/JPH01167050U/ja
Publication of JPH01167050U publication Critical patent/JPH01167050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP6363688U 1988-05-14 1988-05-14 Pending JPH01167050U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6363688U JPH01167050U (en]) 1988-05-14 1988-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6363688U JPH01167050U (en]) 1988-05-14 1988-05-14

Publications (1)

Publication Number Publication Date
JPH01167050U true JPH01167050U (en]) 1989-11-22

Family

ID=31289130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6363688U Pending JPH01167050U (en]) 1988-05-14 1988-05-14

Country Status (1)

Country Link
JP (1) JPH01167050U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7100789B2 (en) 1999-12-08 2006-09-05 Ball Corporation Metallic beverage can end with improved chuck wall and countersink
JP2009182332A (ja) * 2008-01-30 2009-08-13 Asm Internatl Nv ウェハボート

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117730B2 (en]) * 1975-12-15 1986-05-09 Ricoh Kk
JPS6233315U (en]) * 1985-08-14 1987-02-27
JPS6228437B2 (en]) * 1979-12-13 1987-06-19 Hitachi Ltd

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117730B2 (en]) * 1975-12-15 1986-05-09 Ricoh Kk
JPS6228437B2 (en]) * 1979-12-13 1987-06-19 Hitachi Ltd
JPS6233315U (en]) * 1985-08-14 1987-02-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7100789B2 (en) 1999-12-08 2006-09-05 Ball Corporation Metallic beverage can end with improved chuck wall and countersink
JP2009182332A (ja) * 2008-01-30 2009-08-13 Asm Internatl Nv ウェハボート

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